Energy chains, cables and bearing technology for the semiconductor industry

Semiconductor manufacturers are endeavouring to achieve high productivity rates. The overall equipment effectiveness (OEE), which can be increased with solutions from igus, is accordingly important. Our energy supply and cable for cleanroom applications support high production quality, as they are made of high-performance plastics that are abrasion-resistant and have low outgassing. They are compact, low-maintenance, easy to assemble and cost-effective. They also have a modular design so that system operators can expand them at any time. Our products, which increase the OEE in the semiconductor industry worldwide, are used in machines and systems for laser marking, EUV lithography and automatic optical inspection (AOI), among others.

Semiconductor manufacturing equipment with a closed process module and an operator in cleanroom clothing.

Selected products for the semiconductor industry

Flat cable guidance system e-skin flat and CFCLEAN stranded structure

► Cleanroom-compatible according to IPA ISO Class 1
► Modular and compact design
► Cables can be exchanged in minutes
► With coordinated CFCLEAN stranded structure for high reliability
► Available from stock
► No minimum order quantity

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ESKIN flat cleanroom cable guide on a machine.

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Order a free flat cable system e-skin flat

Are you interested in our clean flat cable system e-skin flat, but would like to hold it in your hands to make a final decision and get the best possible impression?
Then you are welcome to order a free sample from us.

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Banderole e-skin flat for protected cable guidance.

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Two-part corrugated tubes

Cleanroom-compatible according to IPA ISO Class 1
Two parts, consisting of upper and lower shell
Quick assembly thanks to "zip" function
For fast, short unsupported applications

e-skin corrugated tubes

igus energy chain system for guiding cables and hoses.

e-chain for high dynamics

Cleanroom-compatible according to IPA ISO Class 1
Optimised design without measurable abrasion
Particularly quiet operation
Side parts made of the material ESD, preventing static charging

e-chain C6

CHAINFLEX CLEAN cables with removed background, four variants and one with an air channel.

Cables in cleanrooms

With highly abrasion-resistant jacket materials
Guaranteed service life of 20 million strokes with a radius of 70mm
The combination of CFCLEAN and e-skin flat

is certified according to Cleanroom Class 1

Cleanroom cables

Dry-running linear guides

No lubrication or maintenance
Certified for use in cleanrooms according to ISO Classes 6 to 3
Particularly quiet running

drylin linear guides

Round igus component with holes for a bearing or rotary connection.

Slewing ring bearing for minimum particle emissions

Ready-to-install slewing ring bearing for lubrication-free dry operation
Maintenance-free sliding elements with low particle emissions
Ring made of lightweight anodised aluminium

PRT-04 slewing ring bearings

Ball bearing with white plastic rings and steel balls, cut out.

Lubrication-free and maintenance-free ball bearings

Ball bearings made from high-performance plastics for low-friction dry operation
Around 50% more cost-effective and lighter than conventional stainless-steel ball bearings

xiros ball bearings

White paper

Energy supply systems for the cleanroom

In this white paper, you will learn how you can use the right energy supply in the cleanroom to

increase plant efficiency
generate higher production line yields
use energy supply systems more sustainably

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Whitepaper with an open cover and two inner pages about cleanroom energy supply systems.

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Customer application examples

Dissipative ESD energy chains and lubrication-free bearings in the testing of printed circuit boards

Flying probe testers, for example, are used to check printed circuit boards for fault-free function. Needles touch and measure the electronic components such as circuit boards under accelerations of up to 15g. To ensure that the test heads are reliably supplied with energy and data, dissipative ESD energy chains are used in SPEA's flying probe tester. drylin linear bearings also allow completely lubrication-free and maintenance-free format adjustment without risking contamination of the electronic components.

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The cable chain guides cables in a SPEA Flying Probe tester.

Linear system with air bearings for high-precision adjustments

An e-skin flat SKF12.4.03.01.1 as a 4-fold layer together with PVC & TPE cables from igus ensures the reliable energy supply of a linear system with air bearings.

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e-skin flat guides cables in an automated system.

Cable guide in the volume pattern generator with over 31 million cycles per year

The energy supply in these volume pattern generator systems must run absolutely smoothly in the cleanroom despite continuous operation. An e-skin flat is used here.

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igus e-chain RBR guides cables cleanly and quietly in a cleanroom application.

Semiconductor automation system

E6 and E14 series energy chains are used in the production of the Fixload semiconductor automation system. Clean air is required for the sensitive application area of the loading interface for 300mm wafer processing devices. The e-chains fulfil the requirements: they are wear-resistant and suitable for IPA ISO Class 2 and 3 cleanrooms.